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SiO2<\/sub> Single crystal substrate<\/h2>\r\n\t\t\t\t\t

<\/p>\r\n\t\t\t\t\t\t\t\r\n\t\t\t\t\t\t\t\t\r\n\t\t\t\t\t\t\t\t\r\n\t\t\t\t\t\t\t
Orientation<\/th>Size<\/th>Surface<\/th>Roughness<\/th>\r\n\t\t\t\t\t\t\t\t<\/tr>\r\n\t\t\t\t\t\t\t\t<\/thead>\r\n\t\t\t\t\t\t\t\t
<0001> Z-cut<\/b><\/td>SSP\/DSP<\/span><\/td><=5A<\/span><\/td><\/tr>
X-cut<\/b><\/td>SSP\/DSP<\/span><\/td><=5A<\/span><\/td><\/tr>
ST-cut<\/b><\/td>SSP\/DSP<\/span><\/td><=5A<\/span><\/td><\/tr>\r\n\t\t\t\t\t\t\t\t<\/tbody>\r\n\t\t\t\t\t\t\t<\/table>\r\n\t\t\t\t\t\t\r\n\t\t\t\t\t
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