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| Grade<\/th> | Production Grade<\/b><\/td> | Research Grade<\/b><\/td> | Dummy Grade<\/b><\/td><\/tr>| Diameter<\/th> | 100.0 mm\u00b10.5 mm<\/td><\/tr> | Thickness<\/th> | 350 \u03bcm\u00b125\u03bcm<\/td><\/tr> | Wafer Orientation<\/th> | On axis : <0001>\u00b10.5\u00b0 Off axis : 4.0 toward \u00b10.5\u00b0<\/td><\/tr> | Primary Flat<\/th> | {10-10}\u00b15.0\u00b0<\/td><\/tr> | Primary Flat Length<\/th> | 32.5 mm\u00b12.0 mm<\/td><\/tr> | Secondary Flat Length<\/th> | 18.0mm\u00b12.0 mm<\/td><\/tr> | Secondary Flat Orientation<\/th> | Si-face:90\u00b0 cw. from orientation flat \u00b1 5\u00b0\/C-face:90\u00b0 ccw. from orientation flat \u00b1 5\u00b0<\/td><\/tr> | Edge exclusion<\/th> | 3 mm<\/td><\/tr> | TTV\/Bow \/Warp<\/th> | \u226445\u03bcm \/\u226445\u03bcm \/\u226445\u03bcm<\/td><\/tr> | Micropipe Density<\/th> | \u226410 cm-2<\/td> | \u226430 cm-2<\/td> | \u2264100 cm-2<\/td><\/tr> | FWHM<\/th> | \uff1c30 arcsec<\/td> | \uff1c50 arcsec<\/td> | \u65e0\u8981\u6c42 N\/A<\/td><\/tr> | Resistivity<\/th> | 4H-N 0.01\u03a9\u00b7cm ~0.03 \u03a9\u00b7cm<\/td> | 4H-N 0.01\u03a9\u00b7cm ~0.1\u03a9\u00b7cm<\/td> | 4H-N 0.01\u03a9\u00b7cm ~0.1\u03a9\u00b7cm<\/td><\/tr> | Roughness<\/th> | Polish Ra\u22641 nm | CMP Ra\u22640.5 nm<\/td> Polish Ra\u22641 nm | CMP Ra\u22640.5 nm<\/td> N\/A | N\/A<\/td><\/tr> Cracks by high intensity light<\/th> | Edge<1mm<\/td> | Edge1-2mm<\/td> | Cumulative length\u226410mm; single length\u22642mm<\/td><\/tr> | Hex Plants by high intensity light<\/th> | 6 allowed \u2264100 microns each<\/td> | 12 allowed \u2264300 microns each<\/td> | Cumulative area\u226430%<\/td><\/tr> | Polytype Areas by high intensity light<\/th> | None<\/td> | Cumulative area\u22642 %<\/td> | Cumulative area\u226410%<\/td><\/tr> | Scratches by high intensity light<\/th> | None<\/td> | None<\/td> | 8 scratches to 1\u00d7wafer diameter cumulative length<\/td><\/tr> | Contamination by high intensity light<\/th> | None<\/td> | None<\/td> | None<\/td><\/tr> | Usable area\r\n<\/th> | \u226590%<\/td> | \u226580%<\/td> | \u226570%<\/td><\/tr>\r\n\t\t\t\t\t\t\t\t<\/tbody>\r\n\t\t\t\t\t\t\t<\/table>\r\n\t\t\t\t\t\t\r\n\t\t\t\t\t | \r\n\t\t\t\t\t\t | ||||||||||||||||||
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