{"Content":"\r\n\t\t\t\t
<\/p>\r\n\t\t\t\t\t\t\t
| Pt layer<\/td> | 150 nm<\/td><\/tr> |
| Ti layer<\/td> | 20 nm<\/td><\/tr> |
| SiO2 layer<\/td> | 300 nm<\/td><\/tr> |
| Si wafer<\/td> | <100> P-type\/B dia4\"x0.5mm SSP<\/td><\/tr> |
| Resistivity<\/td> | 2 ~ 4 ohm-cm<\/td><\/tr> |
| We can cut the wafer into<\/td> |