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Pt\/Ti\/SiO2<\/sub>\/Si single crystal wafer<\/h2>\r\n\t\t\t\t\t

<\/p>\r\n\t\t\t\t\t\t\t\r\n\t\t\t\t\t\t\t\t\r\n\t\t\t\t\t\t\t\t
Pt layer<\/td>150 nm<\/td><\/tr>
Ti layer<\/td>20 nm<\/td><\/tr>
SiO2 layer<\/td>300 nm<\/td><\/tr>
Si wafer<\/td><100> P-type\/B dia4\"x0.5mm SSP<\/td><\/tr>
Resistivity<\/td>2 ~ 4 ohm-cm<\/td><\/tr>
We can cut the wafer into<\/td>