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Applications
- Sputtering
- Plasma Generation
- Induction Heating
- UHV Instrumentation
Features
- Single & Dual Feedthroughs
- frequency range of 100kHz to 13.56MHz
- Temperatures up to 400oC
- Currents up to 800 amps
- Voltages up to 14KV
- Non-magnetic materials throughout
- Weldable, KF and CF flange mounting styles
- Vacuum leak rate <1x 10-10 atm cc/sec(He)
- Custom designs
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Engineered to Perform in High Power Applications
The RF Feedthroughs are designed to reduce power loss without
costly cooling jackets that are required in traditional RF feedthroughs.
The standard RF product line includes both single and dual
conductor feedthroughs. Special custom configurations include feedthroughs
with additional coolant lines, large flanges, coils & other accessories.
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