Recommended for
mechanical, diffusion and turbomolecular pumps
Double distilled
Reduced backstreaming
Extended fluid life
Invoil 20 is the standard mechanical pump fluid
used in applications involving corrosive or reactive gases. Typical applications
include metallurgy, sputtering, LPCVD and plasma etch. When compared to Inland 19,
Invoil 20 will last 3 to 5 times longer.
