FEATURES
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Compact case
available in either bench top or rack mount form
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Large, easy to
read LED displays
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100
programmable films
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Rate
measurement displayed to a resolution of 0.1 Ang
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Thickness
measurement displayed to a resolution of 1 Ang
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RS-232 serial
interface
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Dual analog
outputs to record rate and thickness
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Supports
various frequency sensor crystals
The TM-350 and
TM-400 thin film deposition monitors are designed for reliability and ease of
use yet still provide all of the capabilities necessary for manual control of
the deposition process.
The TM-350 is an
entry level multi-film monitor with a long list of standard features making it
suitable for all but the most demanding applications.
The TM-400 has all
of the features of the TM-350 with the added benefits of 16 times better
measurement resolution and dual sensor head capability. These added features
make the TM-400 suitable for critical applications requiring greater accuracy
and the added security of automatic crystal switching upon failure. The TM-400's
dual sensors also allow the use of one crystal for one material further
improving its accuracy for multi-layer applications.
Measurement
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Frequency Resolution (TM-350) 0.5 Hz @ 6.0
MHz
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Mass Resolution (TM-350) 6.0 ng/cm² (0.224 Ang
Aluminium)
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Frequency Resolution (TM-400) 0.03 Hz
@6.0MHz
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Mass Resolution (TM-400) 0.375 ng/cm² (0.014 Ang
Aluminium)
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Measurement Update Rate Variable from .5 to 10
updates/sec
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Display Update Rate 10 Hz
Display
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Rate Autoranging -999. to +999.9 Ang/sec
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Thickness Autoranging -999. to +999.9
KAng
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Frequency 0,000,000.0 to 9,999,999.9 Hz
Program Parameters
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Film Number 100 programmable films
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Thickness Endpoint 0.000 to 999.9 KAng
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Density 0.80 to 99.99 gm/cm³
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Acoustic Impedance 0.50 to 59.99x10-5
gm/cm²/sec
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Tooling Factor # 1 10.0 to 499.9%
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Tooling Factor # 2 10.0 to 499.9% (TM-400
only)
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Sensor Number 1 to 2 (TM-400 only)
DAC
Outputs - Rate and Thickness 0 to 5V, 11 bit resolution, 2 or 3 Decade range, 0.02%
resolution.
Dual Crystal Shutter Relay
- One single pole double throw Relay, 120 VA, 2A max (TM-400
only)
Source Shutter Relay
- One single pole double throw Relay. 120 VA, 2A
max
Computer Interface
- RS-232 Serial port standard, RS-485 or IEEE-488 ports
optional.
Discrete Inputs
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Electrical TTL level, ground true with internal 4.7 Kohm pull up resistor to 5
volt.
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Functions Start, Stop, Film Number, Increase,
Decrease
Crystal Type
- 2.5, 3.0, 5.0, 6.0, 9.0 or 10.0 MHz
Power Requirements
- 100, 120, 200, 240 VAC 50/60 Hz, 25
Watts
Physical
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Shipping Weight Desktop 5lbs, Rackmount -
9lbs
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Size Desktop Case (3.47”H x 8.4”W x 9.7”D) 19” Rack Mount Case (3.47”H x 19”W x 9.7”D)
