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The
MV-112 is a precision gas flow valve which utilizes a piezoelectric bender
element as the seal actuator. The bender element responds in milliseconds
with precise movements directly proportional to a 0-100 volt DC signal,
making it ideally suited to closed loop flow or pressure control systems
used in semiconductor or other processes. The MV-112 can also be manually
controlled with any 0-100 volt DC power supply. The optional MV-24V
provides valve control with a 0 to 24 volt DC signal.
The MV-112 features: fail-safe operation, externally
adjustable seat to allow threshold voltage to be adjusted, a 7 micron
filter on the inlet, standard Swagelok® or VCR fittings on
inlet and outlet ports, and rugged all stainless steel construction with
Viton® seals.
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Features
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Fast Response
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Precise Contro
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