MDC-370 THIN FILM AVERAGING CONTROLLER

FEATURES

• Automatic and manual sensor/crystal switching.
• Dynamic Measurement Update for optimum resolution and control.
• Resume Process from Abort.
• Up to 16 fully programmable inputs and outputs for system interfacing.
• Audible Attention, Warning and Alarm signals with adjustable volume.
• Up to 6 isolated source outputs with selectable range.
• Standard RS-232 interface
• Storage for 99 processes, 999 layers and 32 materials.

The MDC-370 Averaging Controller is the latest addition to the popular MDC line of thin film deposition controllers. The MDC-370’s most distinguishing feature is its ability to measure up to six crystals at one time, significantly reducing measurement errors due to changes in vapour distribution. In addition, we made the MDC-370 even easier to program using collapsible menus that hide unused parameters where possible. Improvements to the already powerful input and output programming include the addition of logical softnodes and internal event counters. We even added a sensor calibration mode to make the process easier. In keeping with the “ease of use” concept, the MDC-370 still retains the look and feel of the MDC-360 with large LED displays for important run-time values, a graphic LCD display for graphs of rate, rate deviation, thickness and deposit power, an easy to use menu-driven user interface providing unparallel access to plain English programming of processes, materials, inputs and outputs.

 

Measurement

• Frequency Resolution 0.03 Hz @ 6.0 MHz
• Mass Resolution 0.375 ng/cm², (0.014 D Al)
• Thickness Accuracy 0.5% + 1 count
• Measurement Update Rate Dynamically adjusted, 0.5 to 10Hz
• Display Update Rate 10 Hz
• Sensor Crystal Frequency 2.5, 3, 5, 6, 9, 10 MHz

Display

• Thickness Display Autoranging: -999 to 999.9 KD
• Rate Display Autoranging -99 to 999 D/sec
• Power Display 0.0 to 99.9%
• Time Display 0 to 9:59:59 H:MM:SS
• Crystal Health 0 to 99%
• Layer Number 1 to 999
• Graphics Display 256x64 LCD with CCFL backlighting

 

Communication    -    RS232 serial port standard. RS485 serial port optional.IEEE-488 optional.

Programming

• All programming and system configuration is done through the LCD display. Programming is divided into three sections: Process, Material and System. Password protection is available at the Edit, View and Run levels. Defaults to no protection.

Process Programming

• The MDC-370 can store up to 99 user-defined processes. A process is a sequential list of defined layers. A layer is defined by two parameters, its material and its thickness. The MDC-370 can store up to 999 defined layers.

Process Parameters

• Process Name 12 character string
• Edit Password 4 Character string
• Run/View Password 4 Character string
• Layer # 1 to 999 Material name, Thickness

Material Parameters

• The MDC-370 can store up to 32 user-defined materials. The MDC-370 also has a built in material library that contains the name, density and acoustic impedance values of popular deposited materials.

Sensor Set Up    -    Each sensor can be configured to control a single, dual or multiple crystal sensor head.

I/O CapabilityStandard 

• Sensor Inputs 2 Standard BNC
• Source Outputs 2 Fully Isolated 2.5, 5, 10 volts @ 20mA 0.02% resolution
• Passive Inputs* 8 fully programmable, ground true, 4.7 K ohm pull up to 5 volts.
• Active Inputs* 8 fully programmable, 11-130 VAC @ 50-60 Hz or 11-130 VDC * Choice of input type
• Relay Discrete Outputs 8 fully programmable, SPST relay, 120 VA, 2A max.
• Abort Relay Output SPST relay, 120 VA, 2A max.
• Communication RS-232 Rear Panel, 9 pin AT, full duplex Front Panel, RJll -6POS jack full duplex
• Remote Power Handset Front Panel, RJll -4POS jack

Options, Factory Installed    -    RS-485 serial communications port. Rear panel RS-232 can be replaced with RS-485.

Options, User Installed

• Source/Sensor boards increase number of sources and sensors by two, to a maximum of six. Three boards maximum. Active or Passive I/O board increases number of inputs and outputs to sixteen. Two boards maximum. IEEE-488 communication card.

Input Set Up

• Each individual input can be set up to initiate a specific action, under specific conditions, for a specific input state. Inputs associated with pocket or crystal position feedback are predefined.

Output Set Up

• Each individual output can be set up to respond in a specific manner to a specific set of conditions. Outputs associated with pocket rotation or changing crystals are predefined. 

Dac Recorder Set Up

• The MDC-370 has 2 analog, chart recorder outputs. The recorder outputs are configured with the following parameters:

Recorder Parameters

• Recorder # 1 # 2 output:     Rate, Rate Deviation, Power or Thickness
• Recorder # 1 # 2 scale:        Full Scale %, 2/3 Digit

Recorder Specifications

• Output:             0 to 5V
• Resolution:       0.02%